＜EXR-1200FMUV＞Fully automatic UV-LED irradiation machine
Feature
- UV-LED irradiation machine for dicing tape capable of handling 300mm ring frame transfer.
- 8 inches（optional specifications）12-inch wafer（standard specification）, UV-LED irradiation available.
- All parameters for UV-LED irradiation can be controlled by recipes.
- Please contact our representative for more information.
Specification
| Power | AC200-240V, Single Phase |
|---|---|
| Power Consumption | 6KVA |
| Clean Air Pressure(CDA) | 0.5-0.6 MPa(Min Flow Rate:120NL/min) |
| Vacuum | 650-750mmHg(Min Flow Rate:60NL/min) |
| Exhaust Duct Capacity | 【Normal Air】5.0m3/min,40mmH20 (100mm diameter SUS Flange duct connection) |
Equipment layout
| Dimension(WxDxHmm) | 1610x2000x2100 |
|---|---|
| Net Weight | Appx 1200kg |
