EXR-1200 SERIES 300mm Wafer TAPE REMOVER
300mm Wafer TAPE REMOVER TECHNICAL SPECIFICATION
| Applied wafer sizes | ： | 12" (8" possible upon request ) |
| Load / unload capacity | ： | Single (1) Cassette (EXR-1200F1 Model ) |
| ： | Dual (2) Cassettes (EXR-1200F2 Model ) | |
| In Line UV unit | ： | In Line UV irradiation unit available as an option ( - UV ) |
| Required power | ： | 200-240V 2 KVA ( 3 KVA with UV option ) |
| Compressed air | ： | 0.5 MPa (70PSI ) Minimum 120 NL / min |
| Optional Nitrogen | ： | 0.2 MPa Minimum 30 NL/min |
| (Required When UV tape is processed) |