Features
| ■A tap remover for wafers of 300mm(optionally available:8inches) | ■Single and double cassette loading | ■All parameters important for de-taping can be controlled in the recipe. | ■Longer-lasting UV lamp realized by TTS’s proprietary UV technology | ■Can be used with ultra-thin wafers. | ■Other optional features are available. |
Specifications
| Power | AC200-240V,Single Phase |
|---|---|
| Power Consumption | 2KVA[Without UV] 3KVA[With UV] |
| Clean Air Pressure(CDA) | 0.5 – 0.6 MPa ( Min Flow Rate:120NL/min) |
| Vacuum | 650 – 750mmHg ( Min Flow Rate:60NL/min) |
| Nitrogen(For UV) | 0.2 – 0.4 MPa ( Min Flow Rate:20NL/min) |
| Exhaust Duct Capacity | 1.0m3/min,10mmH20(100mm diameter SUS Flange duct connection) |
System Arrangement
| Dimension(WxDxHmm) | 1350×1750×1900 |
|---|---|
| Net Weight | Appx 800Kg |
Featuer
| ■A tape remover for wafers up to 200mm(8inches).(4-,5-,6-,and 8-inch) | ■All parameters important for de-taping can be controlled in the recipe. | ■Longer-lasting UV lamp realized by TTS’s proprietary UV technology | ■Can be used with ultra-thin wafers. | ■Other optional features are available |
Specifications
| Power | AC200-240V,Single Phase |
|---|---|
| Power Consumption | 2KVA[Without UV] 3KVA[With UV] |
| Clean Air Pressure(CDA) | 0.5 – 0.6 MPa ( Min Flow Rate:120NL/min) |
| Vacuum | 650 – 750mmHg ( Min Flow Rate:60NL/min) |
| Nitrogen(For UV) | 0.2 – 0.4 MPa ( Min Flow Rate:20NL/min) |
| Exhaust Duct Capacity | 1.0m3/min,10mmH20(100mm diameter SUS Flange duct connection) |
System Arrangement
| Dimension(WxDxHmm) | 1250×1390×1690 |
|---|---|
| Net Weight | Appx 500Kg |
